Displacement sensing by piezoelectric transducers in high-speed lateral nanopositioning
- Creator: Bazaei, Ali , Boudaoud, Mokrane , Ettefagh, Massoud Hemmasian , Chen, Zhiyong , Regnier, Stephane
- Resource Type: journal article
- Date: 2019
Estimating the resolution of nanopositioning systems from frequency domain data
- Creator: Fleming, Andrew J.
- Resource Type: conference paper
- Date: 2012